Silex Microsystems: Piezoelectric MEMS: An Overview of Materials, Processes and Applications

December 19, 2016 // By Carlos Stahr
A variety of piezoelectric materials can be used for an even broader variety of transducer and actuator applications. This white paper provides an overview of material systems but particularly PZT and AlN, manufacturing processes for bulk and thin films, component characteristics and applications.
piezo-MEMS, piezoelectricity, PZT, AlN, actuators, sensors, energy harvesting, through-silicon-via (TSV), sol-gel deposition, semiconductor, CMOS