Tronics prototypes piezoresistive 6DOF sensor
The 4 square millimeter die includes three accelerometers and three gyroscopes and Tronics claims it is one of the smallest 6DOF die in the industry with scope for further optimization to make it the smallest.
The piezoresistive nanowire technology (see Piezo-nanowires boost fingerprint resolution) allows manufacture of multiple sensor types, including accelerometers, gyroscopes, magnetometers, pressure sensors and microphones, in a single manufacturing process technology and increasing opportunities for monolithic integration.
The sensor sensitivity, power consumption, and noise characteristics are in line with the design models, Tronics said. Industrialization work will continue during 2014 and samples are due to be available in 4Q14. An ASIC is also being designed to complete the sensor platform. Tronics has also designed a 9DOF monolithic MEMS.
"Tronics is delighted to have already partnered with a leading customer and we are very pleased to dramatically reduce time to market and enable superior end product performance," said Pascal Langlois, CEO of Tronics Group, in a statement.
Tronics is a MEMS foundry that operates production sites in Grenoble, France and Dallas, Texas, delivering a broad range of MEMS devices from tested wafers to integrated packaged components.
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