Optical position sensor delivers 0.01nm resolution

February 07, 2017 // By Julien Happich
Zygo Corporation's ZPS absolute position measurement system enables high-precision measurement and positional control for advanced applications, such as deformable optics, lens positioning systems, and fine stage control.

It delivers high-precision, non-contact absolute position measurements on up to 64 synchronized channels. Key features include a new ultra-compact optical sensor and hardware platform that delivers superior sensitivity, resolution and stability over a range of 1.2mm. The advanced optical sensor generates virtually no heat and is insensitive to electromagnetic interference, achieving measurement resolution of 0.01 nm with better than 1 nm/day measurement stability.

In addition, the ZPS system utilizes fiber optic cabling that allows for the use of a remote sensor location without impacting the measurement data. Optional accessories enable real-time automatic compensation for changes in ambient environmental conditions.

Visit Zygo at www.zygo.com